Handbook of Semiconductor Wafer Cleaning Technology - Science, Technology, and Applications
Kern, W.(eds.)
This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date coverage of this rapidly evolving field. Its 13 chapters were written by 19 scientists who are recognized experts.
The depth and breadth of the material should appeal to those new in the field as well as to experienced professionals. The volume is intended to serve as a handbook for practitioners and professionals in the field.
The depth and breadth of the material should appeal to those new in the field as well as to experienced professionals. The volume is intended to serve as a handbook for practitioners and professionals in the field.
カテゴリー:
年:
1993
出版社:
William Andrew Publishing/Noyes
言語:
english
ページ:
649
ISBN 10:
0815517726
ISBN 13:
9780815517726
ファイル:
PDF, 23.58 MB
IPFS:
,
english, 1993
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